蝕刻機(jī)的原理
Principle of etcher
感應(yīng)耦合等離子體刻蝕法（InducTIvely CoupledPlasma Etch，簡(jiǎn)稱ICPE）是化學(xué)過(guò)程和物理過(guò)程共同作用的結(jié)果。它的基本原理是在真空低氣壓下，ICP 射頻電源產(chǎn)生的射頻輸出到環(huán)形耦合線圈，以一定比例的混合刻蝕氣體經(jīng)耦合輝光放電，產(chǎn)生高密度的等離子體，在下電極的RF 射頻作用下，這些等離子體對(duì)基片表面進(jìn)行轟擊，基片圖形區(qū)域的半導(dǎo)體材料的化學(xué)鍵被打斷，與刻蝕氣體生成揮發(fā)性物質(zhì)，以氣體形式脫離基片，然后從真空管路被抽走。
Inductively coupled plasma etch (ICPE) is the result of the interaction of chemical and physical processes. Its basic principle is that under vacuum and low pressure, the RF generated by ICP RF power supply is output to the ring coupling coil, and a certain proportion of mixed etching gas is discharged through coupling glow to generate high-density plasma. Under the RF action of the lower electrode, these plasmas bombard the substrate surface, the chemical bond of semiconductor materials in the substrate pattern area is broken, and volatile substances are generated with the etching gas, It is separated from the substrate in the form of gas and then pumped away from the vacuum line.