刻蝕機(jī)和光刻機(jī)的區(qū)別：光刻機(jī)把圖案印上去，然后刻蝕機(jī)根據(jù)印上去的圖案刻蝕掉有圖案（或者沒有圖案）的部分，留下剩余的部分?？涛g相對(duì)光刻要容易。如果把在硅晶體上的施工比成木匠活的話，光刻機(jī)的作用相當(dāng)于木匠在木料上用墨斗劃線，刻蝕機(jī)的作用相當(dāng)于木匠在木料上用鋸子、鑿子、斧子、刨子等施工。蝕刻機(jī)和光刻機(jī)性質(zhì)一樣，但精度要求是天壤之別。木匠做細(xì)活，一般精確到毫米就行。做芯片用的刻蝕機(jī)和光刻機(jī)，要精確到納米。
The difference between an etching machine and a photolithography machine: the photolithography machine prints the pattern, and then the etching machine etches the part with pattern (or without pattern) according to the printed pattern, leaving the remaining part. Etching is easier than photolithography. If the construction on silicon crystal is compared to that of a carpenter, the function of the photolithography machine is equivalent to that of a carpenter marking with an ink bucket on the wood, and the function of the etching machine is equivalent to that of a carpenter working on the wood with a saw, chisel, axe, plane, etc. The nature of the etching machine is the same as that of the photolithography machine, but the accuracy requirements are very different. Carpenters usually do fine work to the nearest millimeter. The etching machine and lithography machine used for making chips should be accurate to nanometer.